Old Web
English
Sign In
Acemap
>
authorDetail
>
Katie M. Lutker-Lee
Katie M. Lutker-Lee
Optoelectronics
Surface finish
Analytical chemistry
Plasma
Process window
2
Papers
2
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Strategies for aggressive scaling of EUV multi-patterning to sub-20 nm features
2020
Ashim Dutta
Jennifer Church
J. Lee
Brendan O’Brien
Luciana Meli
Chi-Chun Liu
Saumya Sharma
Karen Petrillo
Cody Murray
Eric Liu
Katie M. Lutker-Lee
Qiaowei Lou
Christopher Cole
Angelique Raley
Akiteru Ko
Subhadeep Kal
Jake Kaminsky
Aelan Mosden
Henan Zhang
Shan Hu
Lior Huli
Naoki Shibata
Dave Hetzer
Chia Yun Hsieh
Show All
Source
Cite
Save
Citations (1)
Low-k dielectric etch challenges at the 7 nm logic node and beyond: Continuous-wave versus quasiatomic layer plasma etching performance review
2019
Journal of Vacuum Science and Technology
Katie M. Lutker-Lee
Yen-Tien Lu
Qiaowei Lou
Jake Kaminsky
Yuki Kikuchi
Angelique Raley
Show All
Source
Cite
Save
Citations (1)
1