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Yasuhisa Sone
Yasuhisa Sone
Coating
Resist
Materials science
Composite material
Photoresist
4
Papers
16
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Impact of BARC on SEM shrinkage of ArF resist
2004
Shi Yong Lee
Myung-sun Kim
Sangwoong Yoon
Kyung-Mee Kim
Jae Hyun Kim
Hyun-Woo Kim
Sang Gyun Woo
Young-Ho Kim
Sang-mun Chon
Takahiro Kishioka
Yasuhisa Sone
Yasuyuki Nakajima
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Development of Full-fill Bottom Anti-reflective Coatings for Dual Damascene Process
2001
Yubao Wang
Xiaoming Wu
Gu Xu
James E. Lamb
John Sullivan
James B. Claypool
Jackie Backus
Sean Trautman
Xie Shao
Satoshi Takei
Yasuhisa Sone
Kenichi Mizusawa
Hiroyoshi Fukuro
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Citations (9)
Composition de remplissage d'espaces lithographiques
2001
Satoshi Takei
Kenichi Mizusawa
Yasuhisa Sone
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Deep ultraviolet antireflective coating with improved conformality, optical density, and etch rate
1998
Douglas J. Guerrero
James D. Meador
Gu Xu
Hitoshi Suzuki
Yasuhisa Sone
Vandana Krishnamurthy
James B. Claypool
James E. Lamb
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Citations (4)
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