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Jae Uk Lee
Jae Uk Lee
Katholieke Universiteit Leuven
Extreme ultraviolet
Physics
Optoelectronics
Phase retrieval
Phase (waves)
1
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Coherent scattering microscopy as an effective inspection tool for analyzing performance of phase shift mask.
2016
Optics Express
Dong Gon Woo
Jae Uk Lee
Seong Chul Hong
Jung Sik Kim
Jinho Ahn
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