Old Web
English
Sign In
Acemap
>
authorDetail
>
Dieter Fuchs
Dieter Fuchs
Infineon Technologies
Ion implantation
Chemistry
Process engineering
Materials science
Semiconductor device
5
Papers
9
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (5)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Long term study of the effectiveness of in-situ chemical source clean with XeF2 on ion implanter
2012
Dieter Fuchs
Klaus Kerkel
Josef Vogl
Michael Dorozynskyj
Show All
Source
Cite
Save
Citations (0)
Radiation protection for high energy implantation of light ions in a production environment
2012
Friedrich Kroener
Werner Schustereder
Dieter Fuchs
Show All
Source
Cite
Save
Citations (2)
Ion implantation challenges for power devices
2012
Werner Schustereder
Dieter Fuchs
Oliver Humbel
Bernhard Brunner
Martin Pölzl
Show All
Source
Cite
Save
Citations (3)
Decreasing Beam Auto Tuning Interruption Events with In‐Situ Chemical Cleaning on Axcelis GSD
2008
Dieter Fuchs
Stefan Spreitzer
Josef Vogl
Steve Bishop
David Eldridge
Robert Kaim
Show All
Source
Cite
Save
Citations (3)
In-Situ Ion Source Cleaning: Review of Chemical Mechanisms and Evaluation Data at Production Fabs
2008
Robert Kaim
Steve Bishop
Oleg Byl
David Eldridge
Paul J. Marganski
James J. Mayer
Joseph D. Sweeney
Sharad Yedave
Dieter Fuchs
S. Spreitzer
J. Vogel
Jim Dunn
P. Lundquist
James L. Rolland
T. Romig
D. Newman
M. Mitchell
K. Ditzler
Show All
Source
Cite
Save
Citations (1)
1