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B. Benavente
B. Benavente
University of Concepción
Thin film
Biasing
Sputter deposition
Copper
Composite material
1
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Titanium nitride coatings on copper alloy prepared by dc reactive magnetron sputtering
2004
Journal of Materials Processing Technology
Claudia Carrasco
Luc Segers
B. Benavente
V. Vergara
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Citations (15)
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