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S. Le Roy
S. Le Roy
École Polytechnique
Scanning electron microscope
Ellipsometry
Ion beam
Azimuth
Anisotropy
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Characterization of inclined GaSb nanopillars by Mueller matrix ellipsometry
2010
Journal of Applied Physics
Ingar Stian Nerbø
S. Le Roy
Martin Foldyna
Morten Kildemo
Elin Sondergard
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