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Danny M. Plouff
Danny M. Plouff
IBM
Etching (microfabrication)
Borosilicate glass
Waste management
Membrane
Reflux
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Development of a membrane-etch wet station for x-ray masks
1994
Susan Sonchik Marine
Douglas E. Benoit
Kevin W. Collins
Kurt R. Kimmel
Harold G. Linde
Jeffrey P. Lissor
Danny M. Plouff
James A. Warner
Charles A. Whiting
Jeff D. Towne
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