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M. Gavelle
M. Gavelle
Hoffmann-La Roche
Dopant
Dopant Activation
Chemistry
Transmission electron microscopy
Thermal stability
2
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59
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Defects evolution and dopant activation anomalies in ion implanted silicon
2006
Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms
F. Cristiano
Y. Lamrani
F. Severac
M. Gavelle
S. Boninelli
N. Cherkashin
O. Marcelot
A. Claverie
W. Lerch
S. Paul
N.E.B. Cowern
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Citations (13)
Advanced activation of ultra-shallow junctions using flash-assisted RTP
2005
Materials Science and Engineering B-advanced Functional Solid-state Materials
W. Lerch
S. Paul
J. Niess
Steve McCoy
T. Selinger
J. Gelpey
F. Cristiano
F. Severac
M. Gavelle
S. Boninelli
Peter Pichler
D. Bolze
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Citations (46)
1