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Scott Seo
Scott Seo
PID controller
Polishing
Engineering drawing
Materials science
Composite material
2
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1
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0
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New Yield-Impacting Polishing Induced Defects (PID) and A Method to Identify Them for Polished Si Substrates
2008
Hyo Sik Suh
Byeong-Sam Moon
Keunsu Kim
Jiae Kim
Sivakumar Venkat
Sanghyun Lee
William Shen
Yong Shin
Jonggeun Park
Jeonghoon An
Scott Seo
Sungki Park
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New Method for Identifying Yield Impacting Polishing Induced Defects (PID) on Polished Silicon Substrates
2008
Keunsu Kim
Byeong-Sam Moon
Hyo Sik Suh
Jiae Kim
Sivakumar Venkat
Sanghyun Lee
William Shen
Yong Shin
Jonggeun Park
Jeonghoon An
Scott Seo
Ja-Chun Ku
Sungki Park
Jason Saito
Carlotte Douglas
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Citations (1)
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