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A. A. Kuz’min
A. A. Kuz’min
Moscow Institute of Physics and Technology
Optics
Transmission electron microscopy
Mathematics
Nuclear magnetic resonance
Oxide
3
Papers
1
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0
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Measurement of the native oxide thickness on a reference relief pitch structure on a single-crystal silicon substrate
2013
Russian Microelectronics
V. P. Gavrilenko
A.A. Kuzin
A. Yu. Kuzin
A. A. Kuz’min
V. B. Mityukhlyaev
A. V. Rakov
P. A. Todua
M. N. Fillipov
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Measurement of the thickness of natural oxide on a silicon relief step structure
2013
Measurement Techniques
V. P. Gavrilenko
A. V. Zablotskii
A.A. Kuzin
A. Yu. Kuzin
A. A. Kuz’min
M. A. Ermakova
V. B. Mityukhlyaev
A. V. Rakov
P. A. Todua
M. N. Filippov
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A Method of Estimating the Stability of the Scale Factor of a Transmission Electron Microscope
2013
Measurement Techniques
A. V. Zablotskii
A. S. Avilov
D. S. Bodunov
A.A. Kuzin
A. Yu. Kuzin
A. A. Kuz’min
P. A. Todua
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