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Greg O'Callaghan
Greg O'Callaghan
Materials science
Resist
Extreme ultraviolet lithography
high resolution
Photoresist
4
Papers
3
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0
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Performance enhancements with the high opacity multi-trigger resist
2020
Carmen Popescu
Greg O'Callaghan
Alexandra McClelland
John Roth
Tom Lada
Alex P. G. Robinson
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Citations (1)
Highly substituted fullerene based spin-on organic hardmasks
2020
Alan G. Brown
Guy Dawson
Greg O'Callaghan
Carmen Popescu
Alexandra McClelland
Tom Lada
Bryan Schofield
Warren Montgomery
Alex P. G. Robinson
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Multi-trigger resist: novel synthesis improvements for high resolution EUV lithography
2019
Greg O'Callaghan
Carmen Popescu
Alex Mcclelland
Dimitrios Kazazis
John Roth
Wolfgang Theis
Yasin Ekinci
Alex Philip Graham Robinson
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Initial results with the high opacity multi-trigger resist (Conference Presentation)
2019
Greg O'Callaghan
Carmen Popescu
Yannick Vesters
Alexandra McClelland
John Roth
Wolfgang Theis
Alex P. G. Robinson
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