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Carsten Peters
Carsten Peters
GlobalFoundries
Materials science
Semiconductor
Electrical conductor
Metal
hard mask
3
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Progress in thin wire back-end of-line development
2015
IITC | International Interconnect Technology Conference
Robert Seidel
Grit Bonsdorf
E. Clauss
J. Daleiden
K. Donegan
Frank Feustel
Meike Hauschildt
Bernd Hintze
Frank Koschinsky
G. Marxsen
R. Naumann
Carsten Peters
U. Queitsch
Georg Talut
D. Theiss
M. Zinke
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Integrated circuits and methods for manufacturing integrated circuits with cover layers between metal contacts and interconnections
2014
Torsten Huisinga
Carsten Peters
Andreas Ott
Axel Preusse
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A method comprising removing a hard mask on a semiconductor structure and a rinsing the semiconductor structure with an alkaline rinse solution
2014
Oliver Mieth
Torsten Huisinga
Carsten Peters
Bernd Hintze
Grit Bonsdorf
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