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V. Schauer
V. Schauer
EV Group
Critical dimension
Materials science
Nanotechnology
Dry etching
Scanning electron microscope
3
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Critical Dimension Uniformity characterization of nanoimprinted trenches for high volume manufacturing qualification
2016
H. Teyssèdre
Stefan Landis
Christine Thanner
V. Schauer
M. Laure
W. Zorbach
Laurent Pain
Sandra Bos
Martin Eibelhuber
Markus Wimplinger
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Critical Dimension Uniformity characterization of nanoimprinted trenches for high volume manufacturing qualification
2016
Hubert Teyssedre
Stefan Landis
C. Thanner
V. Schauer
M. Laure
W. Zorbach
Laurent Pain
Sandra Bos
Martin Eibelhuber
Markus Wimplinger
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1