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R Ritomsky
R Ritomsky
Slovak Academy of Sciences
Analytical chemistry
Materials science
Resist
electron energy
Lithography
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3
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Experimental and theoretical study on chemically semi-amplified resist AR-P 6200
2018
Ivan Kostic
Katia Vutova
R. Andok
V. Barak
A Bencurova
R Ritomsky
T. Tanaka
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