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Won Jun Chang
Won Jun Chang
University College of Engineering
Materials science
Critical dimension
Optoelectronics
Etching (microfabrication)
Radiation damage
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Reduction of EUV resist damage by neutral beam etching.
2021
Nanotechnology
Gyo Wun Kim
Won Jun Chang
Ji Eun Kang
Hee Ju Kim
Geun Young Yeom
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