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M. Paoli
M. Paoli
Centre national d'études des télécommunications
Materials science
Electronic engineering
Analytical chemistry
Annealing (metallurgy)
Threshold voltage
3
Papers
10
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Optimization of a self-aligned titanium silicide process for submicron technology
1990
IEEE Transactions on Semiconductor Manufacturing
D. Levy
P. Delpech
M. Paoli
C Masurel
M. Vernet
N. Brun
J.-P. Jeanne
J. P. Gonchond
M. Ada‐Hanifi
M. Haond
T. Ternisien d’Ouville
H. Mingam
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Citations (8)
Avoiding Lateral Diffusion of Dopants in n + /p + Polycide Gates
1989
ESSDERC | European Solid-State Device Research Conference
D.T. Amm
D. Levy
M. Paoli
P. Delpech
T. Ternisien dOuville
H. Mingam
G. Göltz
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Citations (2)
Statistical Measurements of PMOS Subthreshold Current for 1.3 to 0.5 Micron Channel Lengths
1987
ESSDERC | European Solid-State Device Research Conference
T. Ternisien d’Ouville
R. Basset
D. T. Amm
S. Ravezzani
Philippe Delpech
D. Moi
M. Paoli
B. Minghetti
H. Mingam
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