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Giin Shan Chen
Giin Shan Chen
University of Cambridge
Amorphous solid
Cathode ray
Physics
Photolithography
Lithography
1
Papers
8
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Ultimate limits of lithography
1992
Physics World
Cn Morgan
Giin Shan Chen
Chris Boothroyd
Simon Bailey
Collin Humphreys
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Citations (8)
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