Old Web
English
Sign In
Acemap
>
authorDetail
>
M. Lapeyrade
M. Lapeyrade
Silicon nitride
Plasma-enhanced chemical vapor deposition
Thin film
Analytical chemistry
Electron cyclotron resonance
3
Papers
32
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Stress variation in silicon nitride films deposited by ECR plasma
2000
Marie-Paule Besland
M. Lapeyrade
G. Hollinger
F. Delmotte
M. C. Hugon
B. Agius
Show All
Source
Cite
Save
Citations (0)
1