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Alfred Honold
Alfred Honold
Wafer
Chemistry
Metrology
Semiconductor device fabrication
Scheduling (production processes)
5
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22
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Reticle storage in microenvironments with extreme clean dry air
2012
Astrid Gettel
Detlev Glüer
Alfred Honold
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Implementing virtual metrology into semiconductor production processes: an investment assessment
2011
WSC | Winter Simulation Conference
Matthias Koitzsch
Humbert Noll
Alexander Nemecek
Jochen Merhof
Markus Michl
Alfred Honold
Gerhard Kleineidam
Holger Lebrecht
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Automation and fab concepts for 300 mm wafer manufactoring
1999
Microelectronic Engineering
Harald Binder
Alfred Honold
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Citations (3)
25p-X-21 GaAs量子井戸中軽い正孔励起子の位相緩和機構
1991
Alfred Honold
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Optical dephasing and orientational relaxation of wannier-excitons and free carriers in GaAs and GaAs/AlxGa1−xAs quantum wells
1989
J. Kuhl
Alfred Honold
Lothar Schultheis
C. W. Tu
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Citations (17)
1