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Agnès Granier
Agnès Granier
Centre national de la recherche scientifique
Ion
Analytical chemistry
Plasma-enhanced chemical vapor deposition
Materials science
Amorphous solid
2
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11
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Plasma deposition—Impact of ions in plasma enhanced chemical vapor deposition, plasma enhanced atomic layer deposition, and applications to area selective deposition
2020
Journal of Vacuum Science and Technology
Christophe Vallée
M. Bonvalot
Samia Belahcen
Taguhi Yeghoyan
Moustapha Jaffal
Rémi Vallat
Ahmad Chaker
Gautier Lefèvre
Sylvain David
A. Bsiesy
Nicolas Posseme
R. Gassilloud
Agnès Granier
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Citations (10)
Ion impingement effect on the structure and optical properties of Ti x Si 1− x O 2 films deposited by ICP‐PECVD
2019
Plasma Processes and Polymers
Dayu Li
Shuyu Dai
Antoine Goullet
Agnès Granier
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Citations (1)
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