Old Web
English
Sign In
Acemap
>
authorDetail
>
Yashdeep Khopkar
Yashdeep Khopkar
State University of New York System
Nanoparticle
Condensation particle counter
Extreme ultraviolet
Lithography
Particle
1
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Evaluating vacuum components for particle performance for EUV lithography
2014
Proceedings of SPIE
Yashdeep Khopkar
Gregory Denbeaux
Vibhu Jindal
Show All
Source
Cite
Save
Citations (0)
1