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E. Scheid
E. Scheid
CNET
Chemical vapor deposition
Substrate (chemistry)
Thin film
Radiation
Optics
1
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8
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Silicon epitaxy at low temperature, using UV cleaning in a reduced pressure CVD system
1988
Electronics Letters
J. L. Regolini
D. Bensahel
Y. I. Nissim
J.P. Mercier
E. Scheid
A. Perio
E. Andre
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Citations (8)
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