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Sangbin Noh
Sangbin Noh
Hanyang University
Anisotropy
Ellipsometry
Photoresist
Photolithography
Spectral line
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Optical anisotropy approach in spectroscopic ellipsometry to determine the CD of contact hole patterns
2006
Jaisun Kyoung
Hyuknyeong Cheon
Sangbin Noh
Jongkyu Cho
Ilsin An
Suk-joo Lee
Hangu Cho
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