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Puneet Khanna
Puneet Khanna
GlobalFoundries
Fin
Nanotechnology
Multiple patterning
Optics
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Tall FIN formation for FINFET devices of 20nm and beyond using multi-cycles of passivation and etch processes
2013
Proceedings of SPIE
Dae-Han Choi
Dae Geun Yang
Puneet Khanna
Chang Maeng
Owen Hu
Hongliang Shen
Andy Wei
Sung Kim
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