Old Web
English
Sign In
Acemap
>
authorDetail
>
V. Anandan
V. Anandan
IBM
Dielectric
Analytical chemistry
Porosity
Chemical-mechanical planarization
Conductivity
1
Papers
8
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Effects of chemical mechanical polishing on a porous SiCOH dielectric
2012
Microelectronic Engineering
Stephen M. Gates
S. Papa Rao
V. Anandan
Mahadevaiyer Krishnan
S. Cohen
Y. Ostrovski
N. Klymko
M. Chace
D. Canaperi
Show All
Source
Cite
Save
Citations (8)
1