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S. Alamgir
S. Alamgir
Polishing
Copper interconnect
Chemical-mechanical planarization
Dielectric
Engineering
5
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73
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Adoption and Scope of Building Information Modelling (BIM) in Construction Industry of Pakistan
2015
A. Fatima
M Saleem
S. Alamgir
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Citations (3)
Flood Prediction and Disaster Risk Analysis using GIS based Wireless Sensor Networks, A Review
2013
Naveed Ahmad
Mureed Hussain
Naveed Riaz
Fazli Subhani
Sajjad Haider
S. Alamgir
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Citations (29)
Selectivity switch concept in Cu chemical mechanical planarization and its implementation on orbital tools
1999
Journal of Vacuum Science & Technology B
Y. Gotkis
S. Alamgir
Lin Yang
Fen Dai
F Mitchell
J Nguyen
L. Shumway
L. R. Walesa
J. Yang
P. Nunan
Karey Holland
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Citations (1)
Cu CMP with orbital technology: summary of the experience
1998
ASMC | Advanced Semiconductor Manufacturing Conference
Y. Gotkis
Dennis Schey
S. Alamgir
J. Yang
Karey Holland
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Citations (10)
PATTERN AND PROCESS DEPENDENCIES IN COPPER DAMASCENE CHEMICAL MECHANICAL POLISHING PROCESSES
1998
Tamba Tugbawa
J Yoon
Duane S. Boning
J. Chung
R. Muralidhar
Steve Hymes
Y. Gotkis
S. Alamgir
R. Walesa
L. Shumway
G. Wu
F. Zhang
R. Kistler
J Hawkins
Cambridge Ma
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Citations (30)
1