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L.M. Ting
L.M. Ting
Selectivity
Micrometre
Electromigration
Leakage (electronics)
Electronic engineering
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Performance and characterization of a highly selective oxide etch for sub-half micron contacts and vias
1995
VLSI-TSA | International Symposium on VLSI Technology, Systems, and Applications
P.S. McAnally
W. L. Krisa
L.M. Ting
G.A. Dixit
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