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Jong Youn Choi
Jong Youn Choi
University of California, San Diego
Materials science
Deposition (law)
Inorganic chemistry
Atomic layer deposition
X-ray photoelectron spectroscopy
4
Papers
19
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Selective Pulsed Chemical Vapor Deposition of Water-free HfOx on Si in Preference to SiCOH and Passivated SiO2
2020
Applied Surface Science
Jong Youn Choi
Christopher F. Ahles
Yunil Cho
Ashay Anurag
Keith Tatseun Wong
Srinivas D. Nemani
Ellie Yieh
Andrew C. Kummel
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Citations (2)
Selective atomic layer deposition of MoSix on Si (0 0 1) in preference to silicon nitride and silicon oxide
2018
Applied Surface Science
Jong Youn Choi
Christopher F. Ahles
Raymond Hung
Nam Sung Kim
Andrew C. Kummel
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Selective etching of silicon in preference to germanium and Si 0.5 Ge 0.5
2017
VLSIT | Symposium on VLSI Technology
Christopher F. Ahles
Jong Youn Choi
Steven Wolf
Andrew C. Kummel
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Citations (11)
1