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venkatesan maharingamu
venkatesan maharingamu
Composite material
Materials science
Wafer
Inlet
Amorphous silicon
4
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Method and apparatus for forming an improved step with a coverage, amorphous silicon and polysilicon film membrane
1997
esu . atyusaraman vedapuramu
wan syurin
venkatesan maharingamu
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Ha processing chamber - semiconductor weather with susceptor coating the back side
1995
beingurasu isuraeru
piitaa davuryuu . hei eiti .
venkatesan maharingamu
enu . andaason rojaa
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A gas inlet for wafer processing chamber
1994
piitaa daburyuu . hei eiti .
kei . kaaruson dividdo
rirei nooma
venkatesan maharingamu
enu . andaason rojaa
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Gas inlet port for wafer-processing chamber
1994
Roger N. Anderson
David K. Carlson
H. Peter W. Hey
Norma B. Riley
Mahalingam Venkatesan
piitaa daburyuu . hei eiti .
kei . kaaruson dividdo
rirei nooma
venkatesan maharingamu
enu . andaason rojaa
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