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Sebastian Patzig-Klein
Sebastian Patzig-Klein
Freiberg University of Mining and Technology
Etching
Inorganic chemistry
Chemistry
Silicon
Isotropic etching
4
Papers
33
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Etching Silicon with HF–HNO3–H2SO4/H2O Mixtures – Unprecedented Formation of Trifluorosilane, Hexafluorodisiloxane, and Si–F Surface Groups
2012
European Journal of Inorganic Chemistry
Marcus Lippold
Uwe Böhme
Christoph Gondek
Martin Kronstein
Sebastian Patzig-Klein
Martin Weser
Edwin Kroke
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Citations (13)
HF-HNO3-H2SO4/H2O Mixtures for Etching Multicrystalline Silicon Surfaces: Formation of NO2 +, Reaction Rates and Surface Morphologies
2011
Zeitschrift für Naturforschung B
Marcus Lippold
Sebastian Patzig-Klein
Edwin Kroke
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New insights into acidic wet chemical silicon etching by HF/H2O― NOHSO4―H2SO4 solutions
2010
Materials Science in Semiconductor Processing
Sebastian Patzig-Klein
Gerhard Roewer
Edwin Kroke
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Citations (11)
Fundamental Studies of Acidic Wet Chemical Etching Processes: Acidification of HF-HNO3-H2O Etching Mixtures
2009
PEC | World Conference on Photovoltaic Energy Conversion
Edwin Kroke
Sebastian Patzig-Klein
Marcus Lippold
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Citations (1)
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