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Ch. Soll
Ch. Soll
Oxygen
Atomic physics
Deposition (law)
Sputter deposition
Plasma
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Diagnostics of a Chemically Active, Pulsed Microwave Plasma for Deposition of Quartz-like Films
1999
Contributions To Plasma Physics
A. Brockhaus
St. Behle
Anneke Georg
A. Schwabedissen
Ch. Soll
J. Engemann
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Citations (7)
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