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Pc Kluth
Pc Kluth
Forschungszentrum Jülich
Dry etching
Oxide
Annealing (metallurgy)
Photolithography
Titanium
1
Papers
2
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2024
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Growth of patterned thin epitaxial CoSi2-films by a titanium oxide mediated epitaxy process
2000
Thin Solid Films
Pc Kluth
Christophe Detavernier
Qt Zhao
J Xu
Hp Bochem
St. Lenk
Siegfried Mantl
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