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Shain-De Luo
Shain-De Luo
Oxide
Electronic engineering
Photolithography
Residual
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Residual oxide detection with automated E-beam inspection
2005
ISSM | International Symposium on Semiconductor Manufacturing
L Lin
J-Y Chen
Shain-De Luo
Wen-Yi Wong
S. Oestreich
A. Tsai
I. Yao
L. Grella
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Citations (8)
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