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Yeom S
Yeom S
Crystallinity
Thin film
Ranging
Electrical resistivity and conductivity
Materials science
2
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5
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Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant.
2015
Journal of Nanoscience and Nanotechnology
Jung Jh
Seung Joon Lee
Lee Hj
Lee My
Cheon T
Bae Si
Masayuki Saito
Kazuharu Suzuki
Nabeya S
Lee J
Soo Hyun Kim
Yeom S
Seo Jh
Kim Sh
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駅階段の視環境評価に関する研究 (その1) 面接調査の結果
2001
Yeom S
Lee S
munakata atusi
nagata hisao
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1