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Weifeng Deng
Weifeng Deng
Xidian University
Materials science
Semiconductor
Microelectronics
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Optics
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Fluid simulation of the plasma uniformity in new multi-directional source capacitively coupled plasma
2021
AIP Advances
Wenchong Ouyang
Chengbiao Ding
Qi Liu
Shuzhan Gao
Weifeng Deng
Zhengwei Wu
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