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D. Dorflinger
D. Dorflinger
Nanolithography
Manufacturing engineering
Lithography
Flatness (systems theory)
Engineering
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Wafer flatness requirements for 45nm node (65nm hp) lithography process
2008
ASMC | Advanced Semiconductor Manufacturing Conference
R. Ciari
B Meng
M. Thompson
H. Dai
X. Xu
I. Liu
D. Dorflinger
B Yung
C. Ngai
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