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S. Boultadakis

Aristotle University of Thessaloniki

11

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203

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SPECTROSCOPIC ELLIPSOMETRY STUDIES OF VERY THIN THERMALLY GROWN SIO2 FILMS: INFLUENCE OF OXIDATION PROCEDURE ON OXIDE QUALITY AND STRESS

1995 Journal of Applied Physics
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Optical and electronic-structure study of cubic and hexagonal GaN thin films.

1995 Physical Review B
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A spectroscopic ellipsometry study of the interfacial stresses and their correlation with microvoids in very thin thermally grown SiO2 films

1995 Journal of Applied Physics
- S. Logothetidis
- S. Boultadakis
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The effect of hydrogen and temperature on the optical gaps of silicon nitride and comparative stoichiometry studies on SiN thin films

1995 Journal of Non-crystalline Solids
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Optical properties of μc‐Si:H/α‐Si:H layered structures: Influence of the hydrogen bonds, crystallite size, and thickness

1993 Journal of Applied Physics
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Comparative study of thin poly‐Si films grown by ion implantation and annealing with spectroscopic ellipsometry, Raman spectroscopy, and electron microscopy

1992 Journal of Applied Physics
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Comparative study of the properties of ultrathin Si3N4 films with Auger electron spectroscopy, spectroscopic ellipsometry, and Raman spectroscopy

1991 Applied Physics Letters
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Optical properties of Pd-Ni multilayers by spectroscopic ellipsometry

1991 Journal of Magnetism and Magnetic Materials
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Microstructural properties and density dependence of the optical properties of microcrystalline silicon films by spectroscopic ellipsometry and electron microscopy

1989 Thin Solid Films
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Citations (4)