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Scott Warwick
Scott Warwick
Freescale Semiconductor
Optics
Nanotechnology
Miniaturization
Electronic engineering
Materials science
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Through pitch contact hole imaging for the 65nm node
2006
Microelectronic Engineering
Jan-Pieter Kuijten
Will Conley
Arjan Verhappen
Martin Chaplin
Robert John Socha
Lloyd C. Litt
Scott Warwick
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