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kazuyosi sinohara
kazuyosi sinohara
Substrate (chemistry)
Nozzle
Composite material
Materials science
Computer hardware
2
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2024
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A substrate processing apparatus and a substrate processing method and substrate processing program and computer readable recording medium
2014
yangjiechuanyuan
ou kouno
tanaka akatuki
akatuki tanaka
suzuki hirosi
hirosi suzuki
ooisi koutarou
koutarou ooisi
kazuyosi sinohara
Youxiji Tian
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The substrate processing apparatus and the nozzle cleaning method
2013
yosihiro kai
yosinori ikeda
kazuyosi sinohara
oda tetuya
tetuya oda
tanaka akatuki
akatuki tanaka
Youxiji Tian
akinori aihara
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