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R. T. Mumaw
R. T. Mumaw
Optics
Optical microscope
Metrology
Analytical chemistry
Confocal
1
Papers
4
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Multilevel critical dimension/overlay metrology using a real-time confocal scanning optical microscope
1990
Microelectronic Engineering
N. S. Levine
T. R. Corle
R. T. Mumaw
C.-H. Chou
G. S. Kino
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Citations (4)
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