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L. Petersen Barbosa Lima
L. Petersen Barbosa Lima
IMEC
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Immersion lithography
Dielectric
Surface finish
Semiconductor
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Exploration of BEOL line-space patterning options at 12 nm half-pitch and below
2018
Stefan Decoster
Frederic Lazzarino
L. Petersen Barbosa Lima
W. Li
Janko Versluijs
Sandip Halder
Arindam Mallik
Gayle Murdoch
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