Old Web
English
Sign In
Acemap
>
authorDetail
>
Hideo Tanaka
Hideo Tanaka
Canon Inc.
Interposer
Electronic engineering
Die (integrated circuit)
Flatness (systems theory)
Lithography
1
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Submicron Lithography Enabling Panel Based Heterogeneous Integration
2020
Doug Shelton
Kenichiro Mori
Yoshio Goto
Hiroyuki Wada
Hideo Tanaka
Hiromi Suda
Seiya Miura
Show All
Source
Cite
Save
Citations (0)
1