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Matthieu Kipp
Matthieu Kipp
Nanotechnology
Coating
Deep reactive-ion etching
Microfabrication
Photolithography
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Papers
13
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Thick SU-8 photolithography for BioMEMS
2003
Proceedings of SPIE
Marc Rabarot
Jacqueline Bablet
Marine Ruty
Matthieu Kipp
Isabelle Chartier
Christophe Dubarry
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Citations (13)
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