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W. A. Hsieh
W. A. Hsieh
Population
low dose rate
Dry etching
Lithography
Atomic force microscopy
4
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53
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Study of dry etching pattern profile of chromeless phase lithography (CPL) mask
2003
Jimmy Lin
Michael Hsu
Tony Hsu
Stephen Hsu
Xuelong Shi
Douglas Van Den Broeke
J. Fung Chen
F.C. Tang
W. A. Hsieh
Chao-Jung Huang
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Investigation of phase variation impact on CPL PSM for low k1 imaging
2003
Chun-Hung Lin
Michael Hsu
Frank Hsieh
Shu Yi Lin
Stephen Hsu
Xuelong Shi
Douglas Van Den Broeke
J. Fung Chen
F.C. Tang
W. A. Hsieh
Chao-Jung Huang
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Citations (2)
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