Old Web
English
Sign In
Acemap
>
authorDetail
>
Bridget L. OBrien
Bridget L. OBrien
Air Products & Chemicals
Resist
Conditioning
Lithography
Surface finish
Wafer
2
Papers
7
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Surface conditioning solutions to reduce resist line roughness
2004
Peng Zhang
Manuel Jaramillo
Madhukar Bhaskara Rao
Colin Yates
Danielle M. King
Brenda Ross
Bridget L. OBrien
Show All
Source
Cite
Save
Citations (3)
Surface conditioning solutions for pattern collapse reduction
2004
Peng Zhang
Manuel Jaramillo
Danielle M. King
Madhukar Bhaskara Rao
Bridget L. OBrien
Brenda Ross
Show All
Source
Cite
Save
Citations (4)
1