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Masahide Kiritani
Masahide Kiritani
Plasma
Capacitor
Plasma etching
Electrical resistivity and conductivity
Electron
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Effects of Charge Build-up of Underlying Layer by High Aspect Ratio Etching
1998
Japanese Journal of Applied Physics
Kazumasa Yonekura
Masahide Kiritani
Shigenori Sakamori
Takahiro Yokoi
Nobuo Fujiwara
Hiroshi Miyatake
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