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Mikio Ichihasi
Mikio Ichihasi
Electronic circuit
Field emission gun
Analytical chemistry
Astronomical interferometer
Laser
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Automatic electron beam metrology system for development of very large‐scale integrated devices
1987
Journal of Vacuum Science & Technology B
Genya Matsuoka
Mikio Ichihasi
Hisaya Murakoshi
Kenichi Yamamoto
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