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sin ryou satou
sin ryou satou
Materials science
Microstructure
Etching
Composite material
Optoelectronics
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A substrate processing apparatus, and a film forming system
2011
sin ryou satou
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Etching method, a method of manufacturing a microstructure, and etching apparatus
2009
makiko taya
naoya hayami
sin ryou satou
yuri yonekura
hideaki hirabayasi
tei mei kurokawa
nobuo kobayasi
masaaki katou
hiroki domon
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エタノ-ル前処理O3-TEOS-CVDを用いた0.35μm対応良質絶縁膜形成技術 (LSI特集号)
1994
sin ryou satou
sei nakano
yo hirosi oota
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