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BelottiMichele
BelottiMichele
Optics
Materials science
Nanoimprint lithography
Isotropic etching
Photoresist
2
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Superhydrophobic surfaces fabricated by nanoimprint lithography
2006
Microelectronic Engineering
PozzatoAlessandro
ZilioSimone Dal
FoisGiovanni
VendraminDiego
MisturaGiampaolo
BelottiMichele
ChenYong
NataliMarco
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Fabrication of SOI photonic crystal slabs by soft UV-nanoimprint lithography
2006
Microelectronic Engineering
BelottiMichele
TorresJérémi
RoyEmmanuel
PépinAnne
GeraceDario
C AndreaniLucio
GalliMatteo
ChenYong
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