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Derrick Shaughnessy
Derrick Shaughnessy
IMEC
Reflectivity
Analytical chemistry
Optics
optical reflectance
Doping
5
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10
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Transfer From Rs‐based To PMOR‐based Ion Implantation Process Monitoring
2011
Gerrit Smets
Erik Rosseel
Gunther Sterckx
Janusz Bogdanowicz
Wilfried Vandervorst
Derrick Shaughnessy
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Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
2010
Journal of Vacuum Science & Technology B
Janusz Bogdanowicz
Fabian Dortu
Trudo Clarysse
Wilfried Vandervorst
Erik Rosseel
Ngoc Duy Nguyen
Derrick Shaughnessy
Alex Salnik
Lena Nicolaides
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Non-destructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves
2009
Janusz Bogdanowicz
Fabian Dortu
Trudo Clarysse
Wilfried Vandervorst
Erik Rosseel
Duy Nguyen
Derrick Shaughnessy
Alex Salnick
Lena Nicolaides
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Theory of photomodulated optical reflectance on active doping profiles in silicon
2009
Janusz Bogdanowicz
Fabian Dortu
Trudo Clarysse
Wilfried Vandervorst
Derrick Shaughnessy
Alex Salnick
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Advances in optical carrier profiling through high-frequency modulated optical reflectance
2008
Journal of Vacuum Science & Technology B
Janusz Bogdanowicz
Fabian Dortu
Trudo Clarysse
Wilfried Vandervorst
Derrick Shaughnessy
Alex Salnik
Lena Nicolaides
Jon Opsal
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Citations (5)
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